Modeling of plasma transport and negative ion extraction in a magnetized radio-frequency plasma source
نویسندگان
چکیده
منابع مشابه
Ion kinetics in a magnetized plasma source
There are regimes of plasma source operation in which the ion motion is controlled by the ambipolar electric eld and ion-atom collisions. This paper presents a derivation of the corresponding ion distribution function and plasma density pro les in the source for a given electron temperature and a given gas ionization rate. Conditions are discussed under which the ion ux is predominantly radial ...
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ژورنال
عنوان ژورنال: New Journal of Physics
سال: 2017
ISSN: 1367-2630
DOI: 10.1088/1367-2630/19/1/015002